In this review, a possibility is shown to provide for a quasi-stationary mode of excitation and generation in excimer lasers with an automated spark preionization in a peaking or storing circuitries. Both the experimental results obtained by the author and the data reported by other researchers are analyzed. The excitation pulse duration is by n times shorter when a UV preionization is used in the peaking circuitry. This is related to duration of the preionization pulse. Quasi-stationary mode of excitation in Ne mixtures with three-circuit pumping scheme yields a "multi-pulse" output from a XeCl laser. Thus, it is possible to control the duration and shape of the output pulse when using an appropriate power supply.