The characteristics of XeCl (λ~ 308 nm), KrCl (λ~ 222 nm), and XeI (λ ~ 253 nm) capacitive high-frequency discharge excilamps are studied. The possibility of obtaining highly efficient emission of exciplex molecules is shown for the case of excitation by high-frequency capacitive discharge that provides for a simple-design emission source. The UV radiation power of 3 W at the efficiency of electric power conversion of 12% has been achieved. Sealed-off excilamps with a lifetime longer than 1000 hours have been created.