Vol. 14, issue 11, article # 1
pdf Bagaev S. N., Razhev A. M., Chekavinskii V. A., Zhupikov A. A., Karagapoltsev E. S. Effect of pumping parameters and composition of an active medium on the energy and efficiency of electric-discharge ArF and KrF lasers. // Atmospheric and oceanic optics. 2001. V. 14. No. 11. P. 911-914.Copy the reference to clipboard
Abstract:
The dependence of output energy and efficiency of the electric-discharge ArF (193 nm) and KrF (248 nm) excimer lasers on the geometry of active medium and parameters of a high-voltage excitation has been investigated. The design and parameters of the discharge chamber and of the high-voltage excitation circuit of the LC inverter type with automatic preionization (API) providing for the specific pump power of 3.5 MW/cm3 as high were developed and optimized. In a gas active mixture He:Ar:F2 = 79.7:20:0.3 at the total pressure of 2.2 atm, we have managed to achieve, for the first time, the 850 mJ as high output energy of the ArF laser at the over-all efficiency of 1.7% and the pulse duration (FWHM) of 15 ± 1 ns. For a KrF laser in the gas mixture of He:Ne:Kr:F2 = 44.9:44.9:10:0.2 at the total pressure of 2.8 atm, the plug-in efficiency of 2.5% with output radiation energy of 840 mJ was achieved. The maximum output energy of the KrF laser was 1.15 J at the over-all efficiency of 2.2%, pulse duration (FWHM) of 24 ± 1 ns, and the pulse power up to 48 MW.