We report on the development of an excimer laser system with an output aperture of 40 cm. The system consists of five lasers, three of which are excited by an electric discharge and two others by an electron beam. The first laser generates a 200 to 250-ns duration pulse of radiation at λ = 308 nm, with the spectral line width of 0.9 cm-1, and nearly diffraction limited beam divergence. This pulse is amplified in the active medium of other lasers. As a result, the pulse of radiation at the output of the third amplifier has energy of 5 J at the line width of 0.9 cm-1 and 37- μrad beam divergence. The energy of radiation at the output of the entire system is up to 330 J per pulse of 200 to 250-ns duration.