Vol. 11, issue 02-03, article # 2
pdf Bagaev S. N., Zhupikov A. A., Razhev A. M. Increase of the efficiency of excimer ArF and KrF lasers with He as a buffer gas. // Atmospheric and oceanic optics. 1998. V. 11. No. 02-03. P. 94-97.Copy the reference to clipboard
Abstract:
Results of experimental investigations of the energetic and temporal pumping and lasing characteristics of pulsed gas-discharge excimer ArF (193 nm) and KrF (248 nm) lasers with He as a buffer gas are presented. The parameters of a modified high-voltage exciting circuit of LC-inverter type with automatic preionization have been optimized with the use of RU-65 spark-gap switch. Lasing efficiency of 1.5% has been obtained for the active medium He:Ar:F2 in ratios 79.7:20:0.3 at a total pressure of 2.2 atm for an output energy of 360 mJ. The maximum output energy for the ArF laser was 550 mJ for efficiency of 1.4%, 12-ns pulse duration at half maximum, and an output energy density of 4 J/l. The efficiency of the KrF laser with the active medium He:Kr:F2 in ratios 89.8:10:0.2 at a total pressure of 2.5 atm was 2.4% for an output energy of 570 mJ. The maximum output energy for the KrF laser was 820 mJ for efficiency of 2.0%, 24-ns pulse duration at half maximum, and an output energy density of 5.9 J/l.