We present some experimental results on the X-ray sources for preionization of lasing gas mixtures in wide-aperture electric-discharge excimer lasers. X-ray pulse was formed in a thermionic diode of the inverted type at deceleration of the accelerated electrons in the tantalum foil. It is shown that the use of a metal-dielectric cathode enables one to obtain the X-ray radiation with uniform intensity distribution, accurate to 10%, at the quanta energy up to 55 keV and exposure dose up to 160 mR.