Results of experimental and theoretical studies of discharge excimer lasers with 30-35 ns radiation pulse length are presented. The energy of the laser radiation pulses is 0.2-0.6 J and the pulse repetition rate is up to 100 Hz. It is shown that the total laser electric efficiency of 2.6% and the working gas mixture resource more than 106 pulses can be reached.
excimer laser, pumping, laser efficiency, radiation intensity, specific power