Design and performance parameters of high–power noble gas and halide excilamps, radiating at λ = 193 (ArF*), 222 (KrCl*), 248 (KrF*), 308 (XeCl*), and 353 nm (XeF*) and Cl*2 excilamps on molecules at λ = 258 nm are presented. Pulsed longitudinal and barrier discharges and low-pressure continuous glow discharges were used to generate spontaneous UV radiation. Maximum mean power of excilamps up to 40 W at λ = 258 nm, 130 W at λ = 222 nm, and 110 W at λ = 308 nm and the efficiency up to 10–20% were achieved.